Oxford plasmapro 100 polaris icp rie
WebNov 1, 2024 · The PlasmaPro 100 Cobra ICP utilises high-density plasma to achieve high-rate etching. The process modules offer excellent uniformity, high-throughput, high … WebMar 20, 2024 · 6 Oxford ICP Etcher (PlasmaPro 100 Cobra) 6.1 Process Control Data (Oxford ICP Etcher) 6.1.1 Process Control Data for "Std InP Ridge Etch" Cl2/CH4/H2/60°C 6.2 InP Ridge Etch (Oxford ICP Etcher) 6.2.1 Low-Temp (60°C) Process 6.2.1.1 Sample Size effect on Etch Rate 6.3 InP Grating Etch (Oxford ICP Etcher) 6.4 GaAs Etch (Oxford ICP …
Oxford plasmapro 100 polaris icp rie
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Web2000 Oxford PlasmaLab 100. used. Manufacturer: Oxford Instruments. Model: PlasmaLab 100. Oxford PlasmaLab 100 Single chamber RIE etcher S/N 219656 150mm Configuration Inductively coupled plasma ( ICP) power source: up to 2500 W at 2.4 MHz. Radio frequency (RF) power source: up to 600 W at 13.56 MHz. E... Grapevine, TX, USA. Click to Request … WebThe Cobra® ICP etching sources produce a high density of reactive species at low pressure. Substrate DC bias is independently controlled by an RF generator, allowing control of ion …
WebModel: PlasmaLab 100 Oxford PlasmaLab 100 Single chamber RIE etcher S/N 219656 150mm Configuration Inductively coupled plasma ( ICP) power source: up to 2500 W at … WebThe Oxford PlasmaPro 100 Cobra ICP-RIE System is hosted by the Pratt Microfabrication Facility. This tool is used to perform inductively-coupled plasma (ICP) reactive ion etching on silicon based materials, including …
WebThe PlasmaPro 100 Polaris single wafer ICP RIE etch system offers smart solutions to produce the superb etch results you need to maintain your competitive edge. With … PlasmaPro 100 PECVD process modules are specifically designed to produce … WebOct 8, 2024 · The PlasmaPro 100 Estrelas platform is designed to give total flexibility for deep reactive-ion etching (DRIE) of Si, serving a diverse set of process requirements …
WebModel: Oxford PlasmaLab System 100 Location: Nanofab, Building 215, Room A106 Contact: [email protected] . Page 2 OVERVIEW: Operator interface . Page 3 Operation Logging on The tool is interlocked by Coral. Please logging on Coral as a user to access the tool. Only qualified user can operate the tool! ...
WebDescription. The Oxford PlasmaPro NGP80 RIE is only for end user. Please contact us if you have any questions. Subject to prior sale without notice. Appreciate your time! Condition: Used. Location: USA. plotly line graph text locatoinWebThe Oxford PlasmaPro80 RIE is a parallel-plate RIE system purpose-built to etch thin (<500nm) layers of SiO2 and SiNx, for use in creation of hard-masks for deep etching of Si … princess house crystal chip and dip bowlWebThe PlasmaPro 100 Polaris single wafer etch system offers smart solutions to produce the etch results you need to maintain your competitive edge. Actively cooled electrode - Maintains sample temperature during etch process High power ICP source - Produces high density plasmas Reliable hardware and ease of serviceability - Excellent uptime ... plotly line chartshttp://cni.columbia.edu/oxford-plasmapro-100-cobra-cl-drie plotly line graph in rWebDescription The Oxford PlasmaPro NGP80 RIE is available to users who require etching or cleaning of materials using standard RIE processes. Standard recipes exist for oxide, nitride, and Si etches, as well as oxygen plasma cleaning and surface activation processes. Features 300 W RF power supply plotly line hoverWebOXFORD PLASMAPRO NGP80 RIE ETCHER consisting of: - Model: Oxford PlasmaPro NGP80 RIE - Single Chamer RIE, non-load locked - Ideal for R&D reactive ion etch … princess house crystal christmas platterWebThe PlasmaPro 100 RIE modules deliver isotropic and anisotropic dry etching for an extensive range of processes. It is suitable for research and production customers, providing a controlled environment that improves … plotly line graph mean median